Eximer Laser
laser
typeExcimer |
wavelengths in nanometers |
max average
power in Watts |
max peak power | max repetition rate in Hz | pulse duration | minimum bandwidth |
150 nm or longer
|
50 mJ
|
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|
1 W
|
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| between 150nm and 190nm |
|
1.5 J
|
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120 W |
|
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| between 190nm and 360nm |
|
10 J
|
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500 W
|
|
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| 360nm and longer |
|
1.5 J |
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30 W |
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| 240nm
-360nm |
500W |
250hZ |
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| lithography
equipment, see 3B001. |
a.1. Excimer "lasers", having any of the
following:
a.1.a. An output wavelength not
exceeding 150 nm and having any of the
following:
a.1.a.1. An output energy exceeding
50 mJ per pulse; or
a.1.a.2. An average output power
exceeding 1 W;
a.1.b. An output wavelength exceeding
150 nm but not exceeding 190 nm and having any
of the following:
a.1.b.1. An output energy exceeding
1.5 J per pulse; or
a.1.b.2. An average output power
exceeding 120 W;
a.1.c. An output wavelength exceeding
190 nm but not exceeding 360 nm and having any
of the following:
a.1.c.1. An output energy exceeding
10 J per pulse; or
a.1.c.2. An average output power
exceeding 500 W; or
a.1.d. An output wavelength exceeding
360 nm and having any of the following:
a.1.d.1. An output energy exceeding
1.5 J per pulse; or
a.1.d.2. An average output power
exceeding 30 W;
N.B. For excimer "lasers" specially designed
for lithography equipment, see 3B001.
(a) Pulsed excimer "lasers" controlled by
6A005.a.1.c having all of the following
characteristics:
(1) Operating at wavelengths between 240
and 360 nm;
(2) A repetition rate > 250 Hz; and
(3) An average output power > 500 W;